Contamination Control Senior Architect Defectivity

Job Mission

The group is responsible for optimizing the scanner performance by providing the means and methods to prevent, detect, analyze, predict and eliminate particle contamination sources in the scanner.

Furthermore, the group should ensure that the designs of the tools are industrializeable and are compatible with adequate lifetime as determined by contamination

Job Description

In main lines

* Intro: The new systems must be made such that they can operate with an pellicle on the reticle, to protect the reticle from particles. Because the pellicle is in the EUV light path spectral effects require another membrane in the light path, as a spectral filter.

* Both the pellicle and the spectral filter membrane must be provided with the tools and processes, both inside and outside the system, to handle and to inspect the membranes for contamination, to deal with the situation when a membrane breaks, etc. The responsibility of the architect is to define what work packages are needed for this, what the priorities are, and to document these work packages and to get agreement on them in the program and in the factory.

The architect will also have a firm role in the interfacing with the suppliers of the membranes and other hardware, as well as with related projects. Michael Bailey International is acting as an Employment Business in relation to this vacancy.